9/21/2011	8:59:13 AM	Main Vac valve closed
9/21/2011	8:59:24 AM	Main Vac valve opened
9/21/2011	9:00:16 AM	Main Vac valve closed
9/21/2011	9:00:22 AM	Main Vac valve opened
9/21/2011	9:00:23 AM	H2 valve closed
9/21/2011	9:00:56 AM	Main Vac valve closed
9/21/2011	9:00:59 AM	H2 valve opened
9/21/2011	9:01:02 AM	Bypass valve opened
9/21/2011	9:03:42 AM	Bypass valve closed
9/21/2011	9:03:42 AM	Main Vac valve opened
9/21/2011	9:49:54 AM	Main Vac valve closed
9/21/2011	9:49:55 AM	H2 valve closed
9/21/2011	9:50:01 AM	Main Vac valve opened
9/21/2011	9:50:30 AM	Main Vac valve closed
9/21/2011	9:50:31 AM	H2 valve opened
9/21/2011	9:50:32 AM	Bypass valve opened
9/21/2011	9:53:39 AM	Bypass valve closed
9/21/2011	9:53:40 AM	Main Vac valve opened
9/21/2011	10:29:02 AM	Main Vac valve closed
9/21/2011	10:29:09 AM	Main Vac valve opened
9/21/2011	10:29:38 AM	H2 valve closed
9/21/2011	10:30:00 AM	Main Vac valve closed
9/21/2011	10:30:01 AM	H2 valve opened
9/21/2011	10:30:03 AM	Bypass valve opened
9/21/2011	10:33:06 AM	Bypass valve closed
9/21/2011	10:33:06 AM	Main Vac valve opened
9/21/2011	10:59:51 AM	Main Vac valve closed
9/21/2011	10:59:55 AM	Main Vac valve opened
9/21/2011	11:08:55 AM	Main Vac valve closed
9/21/2011	11:08:58 AM	Main Vac valve opened
9/21/2011	11:46:22 AM	Main Vac valve closed
9/21/2011	11:46:27 AM	Main Vac valve opened
9/21/2011	11:46:28 AM	H2 valve closed
9/21/2011	11:46:51 AM	Main Vac valve closed
9/21/2011	11:46:53 AM	H2 valve opened
9/21/2011	11:46:53 AM	Bypass valve opened
9/21/2011	11:50:10 AM	Bypass valve closed
9/21/2011	11:50:11 AM	Main Vac valve opened
9/21/2011	12:07:46 PM	Main Vac valve closed
9/21/2011	12:07:53 PM	Main Vac valve opened
9/21/2011	12:09:09 PM	Main Vac valve closed
9/21/2011	12:09:23 PM	Bypass valve opened
9/21/2011	12:10:15 PM	Bypass valve closed
9/21/2011	12:10:15 PM	Main Vac valve opened
9/21/2011	1:02:20 PM	Main Vac valve closed
9/21/2011	1:02:23 PM	Main Vac valve opened
9/21/2011	1:02:25 PM	H2 valve closed
9/21/2011	1:02:41 PM	Main Vac valve closed
9/21/2011	1:02:42 PM	H2 valve opened
9/21/2011	1:02:46 PM	Bypass valve opened
9/21/2011	1:06:36 PM	Bypass valve closed
9/21/2011	1:06:38 PM	Main Vac valve opened
9/21/2011	1:41:51 PM	Main Vac valve closed
9/21/2011	1:41:54 PM	Main Vac valve opened
9/21/2011	1:44:05 PM	Main Vac valve closed
9/21/2011	1:44:14 PM	H2 valve closed
9/21/2011	1:44:32 PM	H2 valve opened
9/21/2011	1:44:59 PM	Bypass valve opened
9/21/2011	1:48:27 PM	Bypass valve closed
9/21/2011	1:48:27 PM	Main Vac valve opened
9/21/2011	2:25:00 PM	Main Vac valve closed
9/21/2011	2:25:03 PM	Main Vac valve opened
9/21/2011	2:26:40 PM	H2 valve closed
9/21/2011	2:26:44 PM	H2 MFC set to  0.000000
9/21/2011	2:27:24 PM	Main Vac valve closed
9/21/2011	2:27:30 PM	H2 MFC set to  70.000000
9/21/2011	2:27:31 PM	H2 valve opened
9/21/2011	2:27:48 PM	H2 valve closed
9/21/2011	2:27:49 PM	Bypass valve opened
9/21/2011	2:27:53 PM	H2 MFC set to  0.000000
9/21/2011	2:28:17 PM	Bypass valve closed
9/21/2011	2:28:17 PM	Main Vac valve opened
9/21/2011	2:44:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/21/2011	2:44:26 PM	Recipe started at 2:44 PM
9/21/2011	2:44:26 PM	Helium valve closed
9/21/2011	2:44:26 PM	H2 valve closed
9/21/2011	2:44:26 PM	BCl3 valve closed
9/21/2011	2:44:26 PM	PH3 valve closed
9/21/2011	2:44:26 PM	SiCl4 pre valve closed
9/21/2011	2:44:26 PM	SiCl4 post valve closed
9/21/2011	2:44:26 PM	Main Vac valve closed
9/21/2011	2:44:26 PM	Bypass valve closed
9/21/2011	2:44:26 PM	Bubbler valve closed
9/21/2011	2:44:26 PM	Helium MFC set to  0.000000
9/21/2011	2:44:26 PM	H2 MFC set to  0.000000
9/21/2011	2:44:26 PM	BCl3 MFC set to  0.000000
9/21/2011	2:44:26 PM	PHl3 MFC set to  0.000000
9/21/2011	2:44:26 PM	SiCl4 MFC set to  0.000000
9/21/2011	2:44:26 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	2:44:26 PM	Tube furnace set to 0
9/21/2011	2:44:30 PM	H2 valve closed
9/21/2011	2:44:30 PM	BCl3 valve closed
9/21/2011	2:44:30 PM	PH3 valve closed
9/21/2011	2:44:30 PM	SiCl4 pre valve closed
9/21/2011	2:44:30 PM	SiCl4 post valve closed
9/21/2011	2:44:30 PM	Main Vac valve closed
9/21/2011	2:44:30 PM	Bypass valve closed
9/21/2011	2:44:30 PM	Bubbler valve closed
9/21/2011	2:44:30 PM	Helium valve opened
9/21/2011	2:44:30 PM	Helium MFC set to  500.000000
9/21/2011	2:44:30 PM	H2 MFC set to  0.000000
9/21/2011	2:44:30 PM	BCl3 MFC set to  0.000000
9/21/2011	2:44:30 PM	PHl3 MFC set to  0.000000
9/21/2011	2:44:30 PM	SiCl4 MFC set to  0.000000
9/21/2011	2:44:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	2:44:30 PM	Tube furnace set to 0
9/21/2011	2:45:34 PM	Helium valve closed
9/21/2011	2:45:34 PM	H2 valve closed
9/21/2011	2:45:34 PM	BCl3 valve closed
9/21/2011	2:45:34 PM	PH3 valve closed
9/21/2011	2:45:34 PM	SiCl4 pre valve closed
9/21/2011	2:45:34 PM	SiCl4 post valve closed
9/21/2011	2:45:34 PM	Main Vac valve closed
9/21/2011	2:45:34 PM	Bypass valve closed
9/21/2011	2:45:34 PM	Bubbler valve closed
9/21/2011	2:45:34 PM	Helium MFC set to  0.000000
9/21/2011	2:45:34 PM	H2 MFC set to  0.000000
9/21/2011	2:45:34 PM	BCl3 MFC set to  0.000000
9/21/2011	2:45:34 PM	PHl3 MFC set to  0.000000
9/21/2011	2:45:34 PM	SiCl4 MFC set to  0.000000
9/21/2011	2:45:34 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	2:45:35 PM	Tube furnace set to 0
9/21/2011	2:45:36 PM	Run finished at 2:45 PM
9/21/2011	2:45:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/21/2011	2:49:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	2:49:18 PM	Recipe started at 2:49 PM
9/21/2011	2:49:18 PM	Helium valve closed
9/21/2011	2:49:18 PM	H2 valve closed
9/21/2011	2:49:18 PM	BCl3 valve closed
9/21/2011	2:49:18 PM	PH3 valve closed
9/21/2011	2:49:18 PM	SiCl4 pre valve closed
9/21/2011	2:49:18 PM	SiCl4 post valve closed
9/21/2011	2:49:18 PM	Main Vac valve closed
9/21/2011	2:49:18 PM	Bubbler valve closed
9/21/2011	2:49:18 PM	Bypass valve opened
9/21/2011	2:49:18 PM	Helium MFC set to  0.000000
9/21/2011	2:49:18 PM	H2 MFC set to  0.000000
9/21/2011	2:49:18 PM	BCl3 MFC set to  0.000000
9/21/2011	2:49:18 PM	PHl3 MFC set to  0.000000
9/21/2011	2:49:18 PM	SiCl4 MFC set to  0.000000
9/21/2011	2:49:18 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	2:49:18 PM	Tube furnace set to 0
9/21/2011	2:50:31 PM	Helium valve closed
9/21/2011	2:50:31 PM	H2 valve closed
9/21/2011	2:50:31 PM	BCl3 valve closed
9/21/2011	2:50:31 PM	PH3 valve closed
9/21/2011	2:50:31 PM	SiCl4 pre valve closed
9/21/2011	2:50:31 PM	SiCl4 post valve closed
9/21/2011	2:50:31 PM	Main Vac valve closed
9/21/2011	2:50:31 PM	Bubbler valve closed
9/21/2011	2:50:31 PM	Bypass valve opened
9/21/2011	2:50:31 PM	Helium MFC set to  0.000000
9/21/2011	2:50:31 PM	H2 MFC set to  0.000000
9/21/2011	2:50:31 PM	BCl3 MFC set to  0.000000
9/21/2011	2:50:31 PM	PHl3 MFC set to  0.000000
9/21/2011	2:50:31 PM	SiCl4 MFC set to  0.000000
9/21/2011	2:50:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	2:50:31 PM	Tube furnace set to 0
9/21/2011	2:51:31 PM	Helium valve closed
9/21/2011	2:51:31 PM	H2 valve closed
9/21/2011	2:51:31 PM	BCl3 valve closed
9/21/2011	2:51:31 PM	PH3 valve closed
9/21/2011	2:51:31 PM	SiCl4 pre valve closed
9/21/2011	2:51:31 PM	SiCl4 post valve closed
9/21/2011	2:51:31 PM	Bypass valve closed
9/21/2011	2:51:31 PM	Bubbler valve closed
9/21/2011	2:51:31 PM	Main Vac valve opened
9/21/2011	2:51:31 PM	Helium MFC set to  0.000000
9/21/2011	2:51:31 PM	H2 MFC set to  0.000000
9/21/2011	2:51:31 PM	BCl3 MFC set to  0.000000
9/21/2011	2:51:31 PM	PHl3 MFC set to  0.000000
9/21/2011	2:51:31 PM	SiCl4 MFC set to  0.000000
9/21/2011	2:51:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	2:51:32 PM	Tube furnace set to 0
9/21/2011	2:51:33 PM	Run finished at 2:51 PM
9/21/2011	2:51:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	4:08:41 PM	Recipe started at 4:08 PM
9/21/2011	4:08:41 PM	Helium valve closed
9/21/2011	4:08:41 PM	H2 valve closed
9/21/2011	4:08:41 PM	BCl3 valve closed
9/21/2011	4:08:41 PM	PH3 valve closed
9/21/2011	4:08:41 PM	SiCl4 pre valve closed
9/21/2011	4:08:41 PM	SiCl4 post valve closed
9/21/2011	4:08:41 PM	Main Vac valve closed
9/21/2011	4:08:41 PM	Bypass valve closed
9/21/2011	4:08:41 PM	Bubbler valve closed
9/21/2011	4:08:41 PM	Helium MFC set to  0.000000
9/21/2011	4:08:41 PM	H2 MFC set to  0.000000
9/21/2011	4:08:42 PM	BCl3 MFC set to  0.000000
9/21/2011	4:08:42 PM	PHl3 MFC set to  0.000000
9/21/2011	4:08:42 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:08:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:08:42 PM	Tube furnace set to 0
9/21/2011	4:08:45 PM	Helium valve closed
9/21/2011	4:08:45 PM	BCl3 valve closed
9/21/2011	4:08:45 PM	PH3 valve closed
9/21/2011	4:08:45 PM	SiCl4 pre valve closed
9/21/2011	4:08:45 PM	SiCl4 post valve closed
9/21/2011	4:08:45 PM	Main Vac valve closed
9/21/2011	4:08:45 PM	Bypass valve closed
9/21/2011	4:08:45 PM	Bubbler valve closed
9/21/2011	4:08:45 PM	H2 valve opened
9/21/2011	4:08:45 PM	Helium MFC set to  0.000000
9/21/2011	4:08:45 PM	H2 MFC set to  500.000000
9/21/2011	4:08:45 PM	BCl3 MFC set to  0.000000
9/21/2011	4:08:45 PM	PHl3 MFC set to  0.000000
9/21/2011	4:08:45 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:08:45 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:08:45 PM	Tube furnace set to 0
9/21/2011	4:09:52 PM	Helium valve closed
9/21/2011	4:09:52 PM	BCl3 valve closed
9/21/2011	4:09:52 PM	PH3 valve closed
9/21/2011	4:09:52 PM	SiCl4 pre valve closed
9/21/2011	4:09:52 PM	SiCl4 post valve closed
9/21/2011	4:09:52 PM	Main Vac valve closed
9/21/2011	4:09:52 PM	Bypass valve closed
9/21/2011	4:09:52 PM	H2 valve opened
9/21/2011	4:09:52 PM	Bubbler valve opened
9/21/2011	4:09:52 PM	Helium MFC set to  0.000000
9/21/2011	4:09:52 PM	H2 MFC set to  500.000000
9/21/2011	4:09:52 PM	BCl3 MFC set to  0.000000
9/21/2011	4:09:52 PM	PHl3 MFC set to  0.000000
9/21/2011	4:09:52 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:09:52 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:09:53 PM	Tube furnace set to 0
9/21/2011	4:09:54 PM	Helium valve closed
9/21/2011	4:09:54 PM	BCl3 valve closed
9/21/2011	4:09:54 PM	PH3 valve closed
9/21/2011	4:09:54 PM	SiCl4 pre valve closed
9/21/2011	4:09:54 PM	SiCl4 post valve closed
9/21/2011	4:09:54 PM	Main Vac valve closed
9/21/2011	4:09:54 PM	Bypass valve closed
9/21/2011	4:09:54 PM	H2 valve opened
9/21/2011	4:09:54 PM	Bubbler valve opened
9/21/2011	4:09:54 PM	Helium MFC set to  0.000000
9/21/2011	4:09:54 PM	H2 MFC set to  500.000000
9/21/2011	4:09:54 PM	BCl3 MFC set to  0.000000
9/21/2011	4:09:54 PM	PHl3 MFC set to  0.000000
9/21/2011	4:09:54 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:09:54 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:09:54 PM	Tube furnace set to 1000
9/21/2011	4:29:54 PM	Helium valve closed
9/21/2011	4:29:54 PM	PH3 valve closed
9/21/2011	4:29:54 PM	SiCl4 post valve closed
9/21/2011	4:29:54 PM	Main Vac valve closed
9/21/2011	4:29:54 PM	Bypass valve closed
9/21/2011	4:29:54 PM	H2 valve opened
9/21/2011	4:29:54 PM	BCl3 valve opened
9/21/2011	4:29:54 PM	SiCl4 pre valve opened
9/21/2011	4:29:54 PM	Bubbler valve opened
9/21/2011	4:29:54 PM	Helium MFC set to  0.000000
9/21/2011	4:29:54 PM	H2 MFC set to  500.000000
9/21/2011	4:29:54 PM	BCl3 MFC set to  2.000000
9/21/2011	4:29:54 PM	PHl3 MFC set to  0.000000
9/21/2011	4:29:54 PM	SiCl4 MFC set to  50.000000
9/21/2011	4:29:54 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:29:54 PM	Tube furnace set to 1000
9/21/2011	4:29:56 PM	Helium valve closed
9/21/2011	4:29:56 PM	PH3 valve closed
9/21/2011	4:29:56 PM	Main Vac valve closed
9/21/2011	4:29:56 PM	Bypass valve closed
9/21/2011	4:29:56 PM	H2 valve opened
9/21/2011	4:29:56 PM	BCl3 valve opened
9/21/2011	4:29:56 PM	SiCl4 pre valve opened
9/21/2011	4:29:56 PM	SiCl4 post valve opened
9/21/2011	4:29:56 PM	Bubbler valve opened
9/21/2011	4:29:56 PM	Helium MFC set to  0.000000
9/21/2011	4:29:56 PM	H2 MFC set to  500.000000
9/21/2011	4:29:56 PM	BCl3 MFC set to  2.000000
9/21/2011	4:29:56 PM	PHl3 MFC set to  0.000000
9/21/2011	4:29:56 PM	SiCl4 MFC set to  50.000000
9/21/2011	4:29:56 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:29:56 PM	Tube furnace set to 1000
9/21/2011	4:44:56 PM	Helium valve closed
9/21/2011	4:44:56 PM	BCl3 valve closed
9/21/2011	4:44:56 PM	PH3 valve closed
9/21/2011	4:44:56 PM	SiCl4 pre valve closed
9/21/2011	4:44:56 PM	SiCl4 post valve closed
9/21/2011	4:44:56 PM	Main Vac valve closed
9/21/2011	4:44:56 PM	Bypass valve closed
9/21/2011	4:44:56 PM	H2 valve opened
9/21/2011	4:44:56 PM	Bubbler valve opened
9/21/2011	4:44:56 PM	Helium MFC set to  0.000000
9/21/2011	4:44:56 PM	H2 MFC set to  500.000000
9/21/2011	4:44:56 PM	BCl3 MFC set to  0.000000
9/21/2011	4:44:56 PM	PHl3 MFC set to  0.000000
9/21/2011	4:44:56 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:44:56 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:44:56 PM	Tube furnace set to 950
9/21/2011	4:49:56 PM	Helium valve closed
9/21/2011	4:49:56 PM	BCl3 valve closed
9/21/2011	4:49:56 PM	PH3 valve closed
9/21/2011	4:49:56 PM	SiCl4 pre valve closed
9/21/2011	4:49:56 PM	SiCl4 post valve closed
9/21/2011	4:49:56 PM	Main Vac valve closed
9/21/2011	4:49:56 PM	Bypass valve closed
9/21/2011	4:49:56 PM	H2 valve opened
9/21/2011	4:49:56 PM	Bubbler valve opened
9/21/2011	4:49:56 PM	Helium MFC set to  0.000000
9/21/2011	4:49:56 PM	H2 MFC set to  500.000000
9/21/2011	4:49:56 PM	BCl3 MFC set to  0.000000
9/21/2011	4:49:56 PM	PHl3 MFC set to  0.000000
9/21/2011	4:49:56 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:49:56 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:49:56 PM	Tube furnace set to 850
9/21/2011	4:54:56 PM	H2 valve closed
9/21/2011	4:54:56 PM	BCl3 valve closed
9/21/2011	4:54:56 PM	PH3 valve closed
9/21/2011	4:54:56 PM	SiCl4 pre valve closed
9/21/2011	4:54:56 PM	SiCl4 post valve closed
9/21/2011	4:54:56 PM	Main Vac valve closed
9/21/2011	4:54:56 PM	Bypass valve closed
9/21/2011	4:54:56 PM	Helium valve opened
9/21/2011	4:54:56 PM	Bubbler valve opened
9/21/2011	4:54:56 PM	Helium MFC set to  500.000000
9/21/2011	4:54:56 PM	H2 MFC set to  0.000000
9/21/2011	4:54:56 PM	BCl3 MFC set to  0.000000
9/21/2011	4:54:56 PM	PHl3 MFC set to  0.000000
9/21/2011	4:54:56 PM	SiCl4 MFC set to  0.000000
9/21/2011	4:54:56 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	4:54:57 PM	Tube furnace set to 0
9/21/2011	5:34:57 PM	Helium valve closed
9/21/2011	5:34:57 PM	H2 valve closed
9/21/2011	5:34:57 PM	BCl3 valve closed
9/21/2011	5:34:57 PM	PH3 valve closed
9/21/2011	5:34:57 PM	SiCl4 pre valve closed
9/21/2011	5:34:57 PM	SiCl4 post valve closed
9/21/2011	5:34:57 PM	Main Vac valve closed
9/21/2011	5:34:57 PM	Bypass valve closed
9/21/2011	5:34:57 PM	Bubbler valve closed
9/21/2011	5:34:57 PM	Helium MFC set to  0.000000
9/21/2011	5:34:57 PM	H2 MFC set to  0.000000
9/21/2011	5:34:57 PM	BCl3 MFC set to  0.000000
9/21/2011	5:34:57 PM	PHl3 MFC set to  0.000000
9/21/2011	5:34:57 PM	SiCl4 MFC set to  0.000000
9/21/2011	5:34:57 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	5:34:57 PM	Tube furnace set to 0
9/21/2011	5:34:58 PM	Run finished at 5:34 PM
9/21/2011	6:32:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	6:32:00 PM	Recipe started at 6:32 PM
9/21/2011	6:32:00 PM	Helium valve closed
9/21/2011	6:32:00 PM	H2 valve closed
9/21/2011	6:32:00 PM	BCl3 valve closed
9/21/2011	6:32:01 PM	PH3 valve closed
9/21/2011	6:32:01 PM	SiCl4 pre valve closed
9/21/2011	6:32:01 PM	SiCl4 post valve closed
9/21/2011	6:32:01 PM	Main Vac valve closed
9/21/2011	6:32:01 PM	Bubbler valve closed
9/21/2011	6:32:01 PM	Bypass valve opened
9/21/2011	6:32:01 PM	Helium MFC set to  0.000000
9/21/2011	6:32:01 PM	H2 MFC set to  0.000000
9/21/2011	6:32:01 PM	BCl3 MFC set to  0.000000
9/21/2011	6:32:01 PM	PHl3 MFC set to  0.000000
9/21/2011	6:32:01 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:32:01 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:32:01 PM	Tube furnace set to 0
9/21/2011	6:33:37 PM	Helium valve closed
9/21/2011	6:33:37 PM	H2 valve closed
9/21/2011	6:33:37 PM	BCl3 valve closed
9/21/2011	6:33:37 PM	PH3 valve closed
9/21/2011	6:33:37 PM	SiCl4 pre valve closed
9/21/2011	6:33:37 PM	SiCl4 post valve closed
9/21/2011	6:33:37 PM	Main Vac valve closed
9/21/2011	6:33:37 PM	Bubbler valve closed
9/21/2011	6:33:37 PM	Bypass valve opened
9/21/2011	6:33:37 PM	Helium MFC set to  0.000000
9/21/2011	6:33:37 PM	H2 MFC set to  0.000000
9/21/2011	6:33:37 PM	BCl3 MFC set to  0.000000
9/21/2011	6:33:37 PM	PHl3 MFC set to  0.000000
9/21/2011	6:33:37 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:33:37 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:33:37 PM	Tube furnace set to 0
9/21/2011	6:34:37 PM	Helium valve closed
9/21/2011	6:34:37 PM	H2 valve closed
9/21/2011	6:34:37 PM	BCl3 valve closed
9/21/2011	6:34:37 PM	PH3 valve closed
9/21/2011	6:34:37 PM	SiCl4 pre valve closed
9/21/2011	6:34:37 PM	SiCl4 post valve closed
9/21/2011	6:34:37 PM	Bypass valve closed
9/21/2011	6:34:37 PM	Bubbler valve closed
9/21/2011	6:34:37 PM	Main Vac valve opened
9/21/2011	6:34:37 PM	Helium MFC set to  0.000000
9/21/2011	6:34:37 PM	H2 MFC set to  0.000000
9/21/2011	6:34:37 PM	BCl3 MFC set to  0.000000
9/21/2011	6:34:37 PM	PHl3 MFC set to  0.000000
9/21/2011	6:34:37 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:34:37 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:34:38 PM	Tube furnace set to 0
9/21/2011	6:34:39 PM	Run finished at 6:34 PM
9/21/2011	6:34:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	6:35:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/21/2011	6:35:13 PM	Recipe started at 6:35 PM
9/21/2011	6:35:13 PM	Helium valve closed
9/21/2011	6:35:13 PM	H2 valve closed
9/21/2011	6:35:13 PM	BCl3 valve closed
9/21/2011	6:35:13 PM	PH3 valve closed
9/21/2011	6:35:13 PM	SiCl4 pre valve closed
9/21/2011	6:35:13 PM	SiCl4 post valve closed
9/21/2011	6:35:13 PM	Main Vac valve closed
9/21/2011	6:35:13 PM	Bypass valve closed
9/21/2011	6:35:13 PM	Bubbler valve closed
9/21/2011	6:35:13 PM	Helium MFC set to  0.000000
9/21/2011	6:35:13 PM	H2 MFC set to  0.000000
9/21/2011	6:35:13 PM	BCl3 MFC set to  0.000000
9/21/2011	6:35:13 PM	PHl3 MFC set to  0.000000
9/21/2011	6:35:13 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:35:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:35:13 PM	Tube furnace set to 0
9/21/2011	6:35:13 PM	Run finished at 6:35 PM
9/21/2011	6:35:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/21/2011	6:35:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	6:35:25 PM	Recipe started at 6:35 PM
9/21/2011	6:35:25 PM	Helium valve closed
9/21/2011	6:35:25 PM	H2 valve closed
9/21/2011	6:35:25 PM	BCl3 valve closed
9/21/2011	6:35:25 PM	PH3 valve closed
9/21/2011	6:35:25 PM	SiCl4 pre valve closed
9/21/2011	6:35:25 PM	SiCl4 post valve closed
9/21/2011	6:35:25 PM	Main Vac valve closed
9/21/2011	6:35:25 PM	Bubbler valve closed
9/21/2011	6:35:25 PM	Bypass valve opened
9/21/2011	6:35:25 PM	Helium MFC set to  0.000000
9/21/2011	6:35:25 PM	H2 MFC set to  0.000000
9/21/2011	6:35:25 PM	BCl3 MFC set to  0.000000
9/21/2011	6:35:25 PM	PHl3 MFC set to  0.000000
9/21/2011	6:35:25 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:35:25 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:35:25 PM	Tube furnace set to 0
9/21/2011	6:35:25 PM	Helium valve closed
9/21/2011	6:35:25 PM	H2 valve closed
9/21/2011	6:35:25 PM	BCl3 valve closed
9/21/2011	6:35:25 PM	PH3 valve closed
9/21/2011	6:35:25 PM	SiCl4 pre valve closed
9/21/2011	6:35:25 PM	SiCl4 post valve closed
9/21/2011	6:35:25 PM	Main Vac valve closed
9/21/2011	6:35:25 PM	Bubbler valve closed
9/21/2011	6:35:25 PM	Bypass valve opened
9/21/2011	6:35:25 PM	Helium MFC set to  0.000000
9/21/2011	6:35:25 PM	H2 MFC set to  0.000000
9/21/2011	6:35:25 PM	BCl3 MFC set to  0.000000
9/21/2011	6:35:25 PM	PHl3 MFC set to  0.000000
9/21/2011	6:35:25 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:35:25 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:35:25 PM	Tube furnace set to 0
9/21/2011	6:35:29 PM	Helium valve closed
9/21/2011	6:35:29 PM	H2 valve closed
9/21/2011	6:35:29 PM	BCl3 valve closed
9/21/2011	6:35:29 PM	PH3 valve closed
9/21/2011	6:35:29 PM	SiCl4 pre valve closed
9/21/2011	6:35:29 PM	SiCl4 post valve closed
9/21/2011	6:35:29 PM	Bypass valve closed
9/21/2011	6:35:29 PM	Bubbler valve closed
9/21/2011	6:35:29 PM	Main Vac valve opened
9/21/2011	6:35:29 PM	Helium MFC set to  0.000000
9/21/2011	6:35:29 PM	H2 MFC set to  0.000000
9/21/2011	6:35:29 PM	BCl3 MFC set to  0.000000
9/21/2011	6:35:29 PM	PHl3 MFC set to  0.000000
9/21/2011	6:35:29 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:35:29 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:35:29 PM	Tube furnace set to 0
9/21/2011	6:35:30 PM	Run finished at 6:35 PM
9/21/2011	6:35:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	6:36:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/21/2011	6:36:35 PM	Recipe started at 6:36 PM
9/21/2011	6:36:35 PM	Helium valve closed
9/21/2011	6:36:35 PM	H2 valve closed
9/21/2011	6:36:35 PM	BCl3 valve closed
9/21/2011	6:36:35 PM	PH3 valve closed
9/21/2011	6:36:35 PM	SiCl4 pre valve closed
9/21/2011	6:36:35 PM	SiCl4 post valve closed
9/21/2011	6:36:35 PM	Main Vac valve closed
9/21/2011	6:36:35 PM	Bypass valve closed
9/21/2011	6:36:35 PM	Bubbler valve closed
9/21/2011	6:36:35 PM	Helium MFC set to  0.000000
9/21/2011	6:36:35 PM	H2 MFC set to  0.000000
9/21/2011	6:36:35 PM	BCl3 MFC set to  0.000000
9/21/2011	6:36:35 PM	PHl3 MFC set to  0.000000
9/21/2011	6:36:35 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:36:35 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:36:35 PM	Tube furnace set to 0
9/21/2011	6:36:35 PM	Run finished at 6:36 PM
9/21/2011	6:36:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/21/2011	6:36:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	6:36:42 PM	Recipe started at 6:36 PM
9/21/2011	6:36:42 PM	Helium valve closed
9/21/2011	6:36:42 PM	H2 valve closed
9/21/2011	6:36:42 PM	BCl3 valve closed
9/21/2011	6:36:42 PM	PH3 valve closed
9/21/2011	6:36:42 PM	SiCl4 pre valve closed
9/21/2011	6:36:42 PM	SiCl4 post valve closed
9/21/2011	6:36:42 PM	Main Vac valve closed
9/21/2011	6:36:42 PM	Bubbler valve closed
9/21/2011	6:36:42 PM	Bypass valve opened
9/21/2011	6:36:42 PM	Helium MFC set to  0.000000
9/21/2011	6:36:42 PM	H2 MFC set to  0.000000
9/21/2011	6:36:42 PM	BCl3 MFC set to  0.000000
9/21/2011	6:36:42 PM	PHl3 MFC set to  0.000000
9/21/2011	6:36:42 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:36:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:36:43 PM	Tube furnace set to 0
9/21/2011	6:36:43 PM	Helium valve closed
9/21/2011	6:36:43 PM	H2 valve closed
9/21/2011	6:36:43 PM	BCl3 valve closed
9/21/2011	6:36:43 PM	PH3 valve closed
9/21/2011	6:36:43 PM	SiCl4 pre valve closed
9/21/2011	6:36:43 PM	SiCl4 post valve closed
9/21/2011	6:36:43 PM	Main Vac valve closed
9/21/2011	6:36:43 PM	Bubbler valve closed
9/21/2011	6:36:43 PM	Bypass valve opened
9/21/2011	6:36:43 PM	Helium MFC set to  0.000000
9/21/2011	6:36:43 PM	H2 MFC set to  0.000000
9/21/2011	6:36:43 PM	BCl3 MFC set to  0.000000
9/21/2011	6:36:43 PM	PHl3 MFC set to  0.000000
9/21/2011	6:36:43 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:36:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:36:43 PM	Tube furnace set to 0
9/21/2011	6:36:43 PM	Helium valve closed
9/21/2011	6:36:43 PM	H2 valve closed
9/21/2011	6:36:44 PM	BCl3 valve closed
9/21/2011	6:36:44 PM	PH3 valve closed
9/21/2011	6:36:44 PM	SiCl4 pre valve closed
9/21/2011	6:36:44 PM	SiCl4 post valve closed
9/21/2011	6:36:44 PM	Bypass valve closed
9/21/2011	6:36:44 PM	Bubbler valve closed
9/21/2011	6:36:44 PM	Main Vac valve opened
9/21/2011	6:36:44 PM	Helium MFC set to  0.000000
9/21/2011	6:36:44 PM	H2 MFC set to  0.000000
9/21/2011	6:36:44 PM	BCl3 MFC set to  0.000000
9/21/2011	6:36:44 PM	PHl3 MFC set to  0.000000
9/21/2011	6:36:44 PM	SiCl4 MFC set to  0.000000
9/21/2011	6:36:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	6:36:44 PM	Tube furnace set to 0
9/21/2011	6:36:45 PM	Run finished at 6:36 PM
9/21/2011	6:36:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	8:01:33 PM	Recipe started at 8:01 PM
9/21/2011	8:01:33 PM	Helium valve closed
9/21/2011	8:01:33 PM	H2 valve closed
9/21/2011	8:01:33 PM	BCl3 valve closed
9/21/2011	8:01:33 PM	PH3 valve closed
9/21/2011	8:01:33 PM	SiCl4 pre valve closed
9/21/2011	8:01:33 PM	SiCl4 post valve closed
9/21/2011	8:01:33 PM	Main Vac valve closed
9/21/2011	8:01:33 PM	Bypass valve closed
9/21/2011	8:01:33 PM	Bubbler valve closed
9/21/2011	8:01:33 PM	Helium MFC set to  0.000000
9/21/2011	8:01:33 PM	H2 MFC set to  0.000000
9/21/2011	8:01:33 PM	BCl3 MFC set to  0.000000
9/21/2011	8:01:33 PM	PHl3 MFC set to  0.000000
9/21/2011	8:01:33 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:01:33 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:01:33 PM	Tube furnace set to 0
9/21/2011	8:01:36 PM	Helium valve closed
9/21/2011	8:01:36 PM	BCl3 valve closed
9/21/2011	8:01:36 PM	PH3 valve closed
9/21/2011	8:01:36 PM	SiCl4 pre valve closed
9/21/2011	8:01:36 PM	SiCl4 post valve closed
9/21/2011	8:01:36 PM	Main Vac valve closed
9/21/2011	8:01:36 PM	Bypass valve closed
9/21/2011	8:01:36 PM	Bubbler valve closed
9/21/2011	8:01:36 PM	H2 valve opened
9/21/2011	8:01:36 PM	Helium MFC set to  0.000000
9/21/2011	8:01:36 PM	H2 MFC set to  500.000000
9/21/2011	8:01:36 PM	BCl3 MFC set to  0.000000
9/21/2011	8:01:36 PM	PHl3 MFC set to  0.000000
9/21/2011	8:01:36 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:01:36 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:01:36 PM	Tube furnace set to 0
9/21/2011	8:02:43 PM	Helium valve closed
9/21/2011	8:02:43 PM	BCl3 valve closed
9/21/2011	8:02:43 PM	PH3 valve closed
9/21/2011	8:02:43 PM	SiCl4 pre valve closed
9/21/2011	8:02:43 PM	SiCl4 post valve closed
9/21/2011	8:02:43 PM	Main Vac valve closed
9/21/2011	8:02:43 PM	Bypass valve closed
9/21/2011	8:02:43 PM	H2 valve opened
9/21/2011	8:02:43 PM	Bubbler valve opened
9/21/2011	8:02:43 PM	Helium MFC set to  0.000000
9/21/2011	8:02:43 PM	H2 MFC set to  500.000000
9/21/2011	8:02:43 PM	BCl3 MFC set to  0.000000
9/21/2011	8:02:43 PM	PHl3 MFC set to  0.000000
9/21/2011	8:02:43 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:02:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:02:43 PM	Tube furnace set to 0
9/21/2011	8:02:44 PM	Helium valve closed
9/21/2011	8:02:44 PM	BCl3 valve closed
9/21/2011	8:02:44 PM	PH3 valve closed
9/21/2011	8:02:44 PM	SiCl4 pre valve closed
9/21/2011	8:02:44 PM	SiCl4 post valve closed
9/21/2011	8:02:44 PM	Main Vac valve closed
9/21/2011	8:02:44 PM	Bypass valve closed
9/21/2011	8:02:44 PM	H2 valve opened
9/21/2011	8:02:44 PM	Bubbler valve opened
9/21/2011	8:02:44 PM	Helium MFC set to  0.000000
9/21/2011	8:02:44 PM	H2 MFC set to  500.000000
9/21/2011	8:02:44 PM	BCl3 MFC set to  0.000000
9/21/2011	8:02:44 PM	PHl3 MFC set to  0.000000
9/21/2011	8:02:44 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:02:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:02:44 PM	Tube furnace set to 1000
9/21/2011	8:22:44 PM	Helium valve closed
9/21/2011	8:22:44 PM	PH3 valve closed
9/21/2011	8:22:44 PM	SiCl4 post valve closed
9/21/2011	8:22:44 PM	Main Vac valve closed
9/21/2011	8:22:44 PM	Bypass valve closed
9/21/2011	8:22:44 PM	H2 valve opened
9/21/2011	8:22:44 PM	BCl3 valve opened
9/21/2011	8:22:44 PM	SiCl4 pre valve opened
9/21/2011	8:22:44 PM	Bubbler valve opened
9/21/2011	8:22:44 PM	Helium MFC set to  0.000000
9/21/2011	8:22:44 PM	H2 MFC set to  500.000000
9/21/2011	8:22:44 PM	BCl3 MFC set to  2.000000
9/21/2011	8:22:44 PM	PHl3 MFC set to  0.000000
9/21/2011	8:22:44 PM	SiCl4 MFC set to  50.000000
9/21/2011	8:22:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:22:44 PM	Tube furnace set to 1000
9/21/2011	8:22:46 PM	Helium valve closed
9/21/2011	8:22:46 PM	PH3 valve closed
9/21/2011	8:22:46 PM	Main Vac valve closed
9/21/2011	8:22:46 PM	Bypass valve closed
9/21/2011	8:22:46 PM	H2 valve opened
9/21/2011	8:22:46 PM	BCl3 valve opened
9/21/2011	8:22:46 PM	SiCl4 pre valve opened
9/21/2011	8:22:46 PM	SiCl4 post valve opened
9/21/2011	8:22:46 PM	Bubbler valve opened
9/21/2011	8:22:46 PM	Helium MFC set to  0.000000
9/21/2011	8:22:46 PM	H2 MFC set to  500.000000
9/21/2011	8:22:46 PM	BCl3 MFC set to  2.000000
9/21/2011	8:22:46 PM	PHl3 MFC set to  0.000000
9/21/2011	8:22:46 PM	SiCl4 MFC set to  50.000000
9/21/2011	8:22:46 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:22:46 PM	Tube furnace set to 1000
9/21/2011	8:37:46 PM	Helium valve closed
9/21/2011	8:37:46 PM	BCl3 valve closed
9/21/2011	8:37:46 PM	PH3 valve closed
9/21/2011	8:37:46 PM	SiCl4 pre valve closed
9/21/2011	8:37:46 PM	SiCl4 post valve closed
9/21/2011	8:37:46 PM	Main Vac valve closed
9/21/2011	8:37:46 PM	Bypass valve closed
9/21/2011	8:37:46 PM	H2 valve opened
9/21/2011	8:37:46 PM	Bubbler valve opened
9/21/2011	8:37:46 PM	Helium MFC set to  0.000000
9/21/2011	8:37:46 PM	H2 MFC set to  500.000000
9/21/2011	8:37:46 PM	BCl3 MFC set to  0.000000
9/21/2011	8:37:46 PM	PHl3 MFC set to  0.000000
9/21/2011	8:37:46 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:37:46 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:37:46 PM	Tube furnace set to 950
9/21/2011	8:42:46 PM	Helium valve closed
9/21/2011	8:42:46 PM	BCl3 valve closed
9/21/2011	8:42:46 PM	PH3 valve closed
9/21/2011	8:42:46 PM	SiCl4 pre valve closed
9/21/2011	8:42:46 PM	SiCl4 post valve closed
9/21/2011	8:42:46 PM	Main Vac valve closed
9/21/2011	8:42:46 PM	Bypass valve closed
9/21/2011	8:42:46 PM	H2 valve opened
9/21/2011	8:42:46 PM	Bubbler valve opened
9/21/2011	8:42:46 PM	Helium MFC set to  0.000000
9/21/2011	8:42:46 PM	H2 MFC set to  500.000000
9/21/2011	8:42:46 PM	BCl3 MFC set to  0.000000
9/21/2011	8:42:46 PM	PHl3 MFC set to  0.000000
9/21/2011	8:42:46 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:42:46 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:42:47 PM	Tube furnace set to 850
9/21/2011	8:47:47 PM	H2 valve closed
9/21/2011	8:47:47 PM	BCl3 valve closed
9/21/2011	8:47:47 PM	PH3 valve closed
9/21/2011	8:47:47 PM	SiCl4 pre valve closed
9/21/2011	8:47:47 PM	SiCl4 post valve closed
9/21/2011	8:47:47 PM	Main Vac valve closed
9/21/2011	8:47:47 PM	Bypass valve closed
9/21/2011	8:47:47 PM	Helium valve opened
9/21/2011	8:47:47 PM	Bubbler valve opened
9/21/2011	8:47:47 PM	Helium MFC set to  500.000000
9/21/2011	8:47:47 PM	H2 MFC set to  0.000000
9/21/2011	8:47:47 PM	BCl3 MFC set to  0.000000
9/21/2011	8:47:47 PM	PHl3 MFC set to  0.000000
9/21/2011	8:47:47 PM	SiCl4 MFC set to  0.000000
9/21/2011	8:47:47 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	8:47:47 PM	Tube furnace set to 0
9/21/2011	9:03:03 PM	Helium valve closed
9/21/2011	9:03:03 PM	H2 valve closed
9/21/2011	9:03:03 PM	BCl3 valve closed
9/21/2011	9:03:03 PM	PH3 valve closed
9/21/2011	9:03:03 PM	SiCl4 pre valve closed
9/21/2011	9:03:03 PM	SiCl4 post valve closed
9/21/2011	9:03:03 PM	Main Vac valve closed
9/21/2011	9:03:03 PM	Bypass valve closed
9/21/2011	9:03:03 PM	Bubbler valve closed
9/21/2011	9:03:03 PM	Helium MFC set to  0.000000
9/21/2011	9:03:03 PM	H2 MFC set to  0.000000
9/21/2011	9:03:03 PM	BCl3 MFC set to  0.000000
9/21/2011	9:03:03 PM	PHl3 MFC set to  0.000000
9/21/2011	9:03:03 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:03:03 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:03:03 PM	Tube furnace set to 0
9/21/2011	9:03:04 PM	Run finished at 9:03 PM
9/21/2011	9:09:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	9:09:35 PM	Recipe started at 9:09 PM
9/21/2011	9:09:35 PM	Helium valve closed
9/21/2011	9:09:35 PM	H2 valve closed
9/21/2011	9:09:35 PM	BCl3 valve closed
9/21/2011	9:09:35 PM	PH3 valve closed
9/21/2011	9:09:35 PM	SiCl4 pre valve closed
9/21/2011	9:09:35 PM	SiCl4 post valve closed
9/21/2011	9:09:35 PM	Main Vac valve closed
9/21/2011	9:09:35 PM	Bubbler valve closed
9/21/2011	9:09:35 PM	Bypass valve opened
9/21/2011	9:09:35 PM	Helium MFC set to  0.000000
9/21/2011	9:09:35 PM	H2 MFC set to  0.000000
9/21/2011	9:09:35 PM	BCl3 MFC set to  0.000000
9/21/2011	9:09:35 PM	PHl3 MFC set to  0.000000
9/21/2011	9:09:35 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:09:35 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:09:35 PM	Tube furnace set to 0
9/21/2011	9:10:43 PM	Helium valve closed
9/21/2011	9:10:43 PM	H2 valve closed
9/21/2011	9:10:43 PM	BCl3 valve closed
9/21/2011	9:10:43 PM	PH3 valve closed
9/21/2011	9:10:43 PM	SiCl4 pre valve closed
9/21/2011	9:10:43 PM	SiCl4 post valve closed
9/21/2011	9:10:43 PM	Main Vac valve closed
9/21/2011	9:10:43 PM	Bubbler valve closed
9/21/2011	9:10:43 PM	Bypass valve opened
9/21/2011	9:10:43 PM	Helium MFC set to  0.000000
9/21/2011	9:10:43 PM	H2 MFC set to  0.000000
9/21/2011	9:10:43 PM	BCl3 MFC set to  0.000000
9/21/2011	9:10:43 PM	PHl3 MFC set to  0.000000
9/21/2011	9:10:43 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:10:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:10:43 PM	Tube furnace set to 0
9/21/2011	9:11:43 PM	Helium valve closed
9/21/2011	9:11:43 PM	H2 valve closed
9/21/2011	9:11:43 PM	BCl3 valve closed
9/21/2011	9:11:43 PM	PH3 valve closed
9/21/2011	9:11:43 PM	SiCl4 pre valve closed
9/21/2011	9:11:43 PM	SiCl4 post valve closed
9/21/2011	9:11:43 PM	Bypass valve closed
9/21/2011	9:11:43 PM	Bubbler valve closed
9/21/2011	9:11:43 PM	Main Vac valve opened
9/21/2011	9:11:43 PM	Helium MFC set to  0.000000
9/21/2011	9:11:43 PM	H2 MFC set to  0.000000
9/21/2011	9:11:43 PM	BCl3 MFC set to  0.000000
9/21/2011	9:11:43 PM	PHl3 MFC set to  0.000000
9/21/2011	9:11:43 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:11:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:11:44 PM	Tube furnace set to 0
9/21/2011	9:11:45 PM	Run finished at 9:11 PM
9/21/2011	9:11:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	9:55:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/21/2011	9:55:25 PM	Recipe started at 9:55 PM
9/21/2011	9:55:25 PM	Helium valve closed
9/21/2011	9:55:25 PM	H2 valve closed
9/21/2011	9:55:25 PM	BCl3 valve closed
9/21/2011	9:55:25 PM	PH3 valve closed
9/21/2011	9:55:25 PM	SiCl4 pre valve closed
9/21/2011	9:55:25 PM	SiCl4 post valve closed
9/21/2011	9:55:25 PM	Main Vac valve closed
9/21/2011	9:55:25 PM	Bypass valve closed
9/21/2011	9:55:25 PM	Bubbler valve closed
9/21/2011	9:55:25 PM	Helium MFC set to  0.000000
9/21/2011	9:55:25 PM	H2 MFC set to  0.000000
9/21/2011	9:55:25 PM	BCl3 MFC set to  0.000000
9/21/2011	9:55:25 PM	PHl3 MFC set to  0.000000
9/21/2011	9:55:25 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:55:25 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:55:25 PM	Tube furnace set to 0
9/21/2011	9:55:25 PM	Run finished at 9:55 PM
9/21/2011	9:55:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/21/2011	9:55:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	9:55:36 PM	Recipe started at 9:55 PM
9/21/2011	9:55:36 PM	Helium valve closed
9/21/2011	9:55:36 PM	H2 valve closed
9/21/2011	9:55:36 PM	BCl3 valve closed
9/21/2011	9:55:36 PM	PH3 valve closed
9/21/2011	9:55:36 PM	SiCl4 pre valve closed
9/21/2011	9:55:36 PM	SiCl4 post valve closed
9/21/2011	9:55:36 PM	Main Vac valve closed
9/21/2011	9:55:36 PM	Bubbler valve closed
9/21/2011	9:55:36 PM	Bypass valve opened
9/21/2011	9:55:36 PM	Helium MFC set to  0.000000
9/21/2011	9:55:36 PM	H2 MFC set to  0.000000
9/21/2011	9:55:36 PM	BCl3 MFC set to  0.000000
9/21/2011	9:55:36 PM	PHl3 MFC set to  0.000000
9/21/2011	9:55:36 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:55:36 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:55:36 PM	Tube furnace set to 0
9/21/2011	9:55:36 PM	Helium valve closed
9/21/2011	9:55:36 PM	H2 valve closed
9/21/2011	9:55:36 PM	BCl3 valve closed
9/21/2011	9:55:36 PM	PH3 valve closed
9/21/2011	9:55:36 PM	SiCl4 pre valve closed
9/21/2011	9:55:36 PM	SiCl4 post valve closed
9/21/2011	9:55:36 PM	Main Vac valve closed
9/21/2011	9:55:36 PM	Bubbler valve closed
9/21/2011	9:55:36 PM	Bypass valve opened
9/21/2011	9:55:36 PM	Helium MFC set to  0.000000
9/21/2011	9:55:36 PM	H2 MFC set to  0.000000
9/21/2011	9:55:36 PM	BCl3 MFC set to  0.000000
9/21/2011	9:55:36 PM	PHl3 MFC set to  0.000000
9/21/2011	9:55:36 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:55:36 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:55:36 PM	Tube furnace set to 0
9/21/2011	9:55:38 PM	Helium valve closed
9/21/2011	9:55:38 PM	H2 valve closed
9/21/2011	9:55:38 PM	BCl3 valve closed
9/21/2011	9:55:38 PM	PH3 valve closed
9/21/2011	9:55:38 PM	SiCl4 pre valve closed
9/21/2011	9:55:38 PM	SiCl4 post valve closed
9/21/2011	9:55:38 PM	Bypass valve closed
9/21/2011	9:55:38 PM	Bubbler valve closed
9/21/2011	9:55:38 PM	Main Vac valve opened
9/21/2011	9:55:38 PM	Helium MFC set to  0.000000
9/21/2011	9:55:38 PM	H2 MFC set to  0.000000
9/21/2011	9:55:38 PM	BCl3 MFC set to  0.000000
9/21/2011	9:55:38 PM	PHl3 MFC set to  0.000000
9/21/2011	9:55:38 PM	SiCl4 MFC set to  0.000000
9/21/2011	9:55:38 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	9:55:38 PM	Tube furnace set to 0
9/21/2011	9:55:39 PM	Run finished at 9:55 PM
9/21/2011	9:55:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	10:02:31 PM	Recipe started at 10:02 PM
9/21/2011	10:02:31 PM	Helium valve closed
9/21/2011	10:02:31 PM	H2 valve closed
9/21/2011	10:02:31 PM	BCl3 valve closed
9/21/2011	10:02:31 PM	PH3 valve closed
9/21/2011	10:02:31 PM	SiCl4 pre valve closed
9/21/2011	10:02:31 PM	SiCl4 post valve closed
9/21/2011	10:02:31 PM	Main Vac valve closed
9/21/2011	10:02:31 PM	Bypass valve closed
9/21/2011	10:02:31 PM	Bubbler valve closed
9/21/2011	10:02:31 PM	Helium MFC set to  0.000000
9/21/2011	10:02:31 PM	H2 MFC set to  0.000000
9/21/2011	10:02:31 PM	BCl3 MFC set to  0.000000
9/21/2011	10:02:31 PM	PHl3 MFC set to  0.000000
9/21/2011	10:02:31 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:02:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:02:31 PM	Tube furnace set to 0
9/21/2011	10:02:34 PM	Helium valve closed
9/21/2011	10:02:34 PM	BCl3 valve closed
9/21/2011	10:02:34 PM	PH3 valve closed
9/21/2011	10:02:34 PM	SiCl4 pre valve closed
9/21/2011	10:02:34 PM	SiCl4 post valve closed
9/21/2011	10:02:34 PM	Main Vac valve closed
9/21/2011	10:02:34 PM	Bypass valve closed
9/21/2011	10:02:34 PM	Bubbler valve closed
9/21/2011	10:02:34 PM	H2 valve opened
9/21/2011	10:02:34 PM	Helium MFC set to  0.000000
9/21/2011	10:02:34 PM	H2 MFC set to  500.000000
9/21/2011	10:02:34 PM	BCl3 MFC set to  0.000000
9/21/2011	10:02:34 PM	PHl3 MFC set to  0.000000
9/21/2011	10:02:34 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:02:34 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:02:34 PM	Tube furnace set to 0
9/21/2011	10:03:37 PM	Helium valve closed
9/21/2011	10:03:37 PM	BCl3 valve closed
9/21/2011	10:03:37 PM	PH3 valve closed
9/21/2011	10:03:37 PM	SiCl4 pre valve closed
9/21/2011	10:03:37 PM	SiCl4 post valve closed
9/21/2011	10:03:37 PM	Main Vac valve closed
9/21/2011	10:03:37 PM	Bypass valve closed
9/21/2011	10:03:37 PM	H2 valve opened
9/21/2011	10:03:37 PM	Bubbler valve opened
9/21/2011	10:03:37 PM	Helium MFC set to  0.000000
9/21/2011	10:03:37 PM	H2 MFC set to  500.000000
9/21/2011	10:03:37 PM	BCl3 MFC set to  0.000000
9/21/2011	10:03:37 PM	PHl3 MFC set to  0.000000
9/21/2011	10:03:37 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:03:37 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:03:37 PM	Tube furnace set to 0
9/21/2011	10:03:38 PM	Helium valve closed
9/21/2011	10:03:38 PM	BCl3 valve closed
9/21/2011	10:03:38 PM	PH3 valve closed
9/21/2011	10:03:38 PM	SiCl4 pre valve closed
9/21/2011	10:03:38 PM	SiCl4 post valve closed
9/21/2011	10:03:38 PM	Main Vac valve closed
9/21/2011	10:03:38 PM	Bypass valve closed
9/21/2011	10:03:38 PM	H2 valve opened
9/21/2011	10:03:38 PM	Bubbler valve opened
9/21/2011	10:03:38 PM	Helium MFC set to  0.000000
9/21/2011	10:03:38 PM	H2 MFC set to  500.000000
9/21/2011	10:03:38 PM	BCl3 MFC set to  0.000000
9/21/2011	10:03:38 PM	PHl3 MFC set to  0.000000
9/21/2011	10:03:38 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:03:38 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:03:38 PM	Tube furnace set to 1000
9/21/2011	10:23:38 PM	Helium valve closed
9/21/2011	10:23:38 PM	PH3 valve closed
9/21/2011	10:23:38 PM	SiCl4 post valve closed
9/21/2011	10:23:38 PM	Main Vac valve closed
9/21/2011	10:23:38 PM	Bypass valve closed
9/21/2011	10:23:38 PM	H2 valve opened
9/21/2011	10:23:38 PM	BCl3 valve opened
9/21/2011	10:23:38 PM	SiCl4 pre valve opened
9/21/2011	10:23:38 PM	Bubbler valve opened
9/21/2011	10:23:38 PM	Helium MFC set to  0.000000
9/21/2011	10:23:38 PM	H2 MFC set to  500.000000
9/21/2011	10:23:38 PM	BCl3 MFC set to  2.000000
9/21/2011	10:23:38 PM	PHl3 MFC set to  0.000000
9/21/2011	10:23:38 PM	SiCl4 MFC set to  50.000000
9/21/2011	10:23:38 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:23:38 PM	Tube furnace set to 1000
9/21/2011	10:23:40 PM	Helium valve closed
9/21/2011	10:23:40 PM	PH3 valve closed
9/21/2011	10:23:40 PM	Main Vac valve closed
9/21/2011	10:23:40 PM	Bypass valve closed
9/21/2011	10:23:40 PM	H2 valve opened
9/21/2011	10:23:40 PM	BCl3 valve opened
9/21/2011	10:23:40 PM	SiCl4 pre valve opened
9/21/2011	10:23:40 PM	SiCl4 post valve opened
9/21/2011	10:23:40 PM	Bubbler valve opened
9/21/2011	10:23:40 PM	Helium MFC set to  0.000000
9/21/2011	10:23:40 PM	H2 MFC set to  500.000000
9/21/2011	10:23:40 PM	BCl3 MFC set to  2.000000
9/21/2011	10:23:40 PM	PHl3 MFC set to  0.000000
9/21/2011	10:23:40 PM	SiCl4 MFC set to  50.000000
9/21/2011	10:23:40 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:23:40 PM	Tube furnace set to 1000
9/21/2011	10:38:40 PM	Helium valve closed
9/21/2011	10:38:40 PM	BCl3 valve closed
9/21/2011	10:38:40 PM	PH3 valve closed
9/21/2011	10:38:40 PM	SiCl4 pre valve closed
9/21/2011	10:38:40 PM	SiCl4 post valve closed
9/21/2011	10:38:40 PM	Main Vac valve closed
9/21/2011	10:38:40 PM	Bypass valve closed
9/21/2011	10:38:40 PM	H2 valve opened
9/21/2011	10:38:40 PM	Bubbler valve opened
9/21/2011	10:38:40 PM	Helium MFC set to  0.000000
9/21/2011	10:38:40 PM	H2 MFC set to  500.000000
9/21/2011	10:38:40 PM	BCl3 MFC set to  0.000000
9/21/2011	10:38:40 PM	PHl3 MFC set to  0.000000
9/21/2011	10:38:40 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:38:40 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:38:41 PM	Tube furnace set to 950
9/21/2011	10:43:41 PM	Helium valve closed
9/21/2011	10:43:41 PM	BCl3 valve closed
9/21/2011	10:43:41 PM	PH3 valve closed
9/21/2011	10:43:41 PM	SiCl4 pre valve closed
9/21/2011	10:43:41 PM	SiCl4 post valve closed
9/21/2011	10:43:41 PM	Main Vac valve closed
9/21/2011	10:43:41 PM	Bypass valve closed
9/21/2011	10:43:41 PM	H2 valve opened
9/21/2011	10:43:41 PM	Bubbler valve opened
9/21/2011	10:43:41 PM	Helium MFC set to  0.000000
9/21/2011	10:43:41 PM	H2 MFC set to  500.000000
9/21/2011	10:43:41 PM	BCl3 MFC set to  0.000000
9/21/2011	10:43:41 PM	PHl3 MFC set to  0.000000
9/21/2011	10:43:41 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:43:41 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:43:41 PM	Tube furnace set to 850
9/21/2011	10:48:41 PM	H2 valve closed
9/21/2011	10:48:41 PM	BCl3 valve closed
9/21/2011	10:48:41 PM	PH3 valve closed
9/21/2011	10:48:41 PM	SiCl4 pre valve closed
9/21/2011	10:48:41 PM	SiCl4 post valve closed
9/21/2011	10:48:41 PM	Main Vac valve closed
9/21/2011	10:48:41 PM	Bypass valve closed
9/21/2011	10:48:41 PM	Helium valve opened
9/21/2011	10:48:41 PM	Bubbler valve opened
9/21/2011	10:48:41 PM	Helium MFC set to  500.000000
9/21/2011	10:48:41 PM	H2 MFC set to  0.000000
9/21/2011	10:48:41 PM	BCl3 MFC set to  0.000000
9/21/2011	10:48:41 PM	PHl3 MFC set to  0.000000
9/21/2011	10:48:41 PM	SiCl4 MFC set to  0.000000
9/21/2011	10:48:41 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	10:48:41 PM	Tube furnace set to 0
9/21/2011	11:01:18 PM	Helium valve closed
9/21/2011	11:01:18 PM	H2 valve closed
9/21/2011	11:01:18 PM	BCl3 valve closed
9/21/2011	11:01:18 PM	PH3 valve closed
9/21/2011	11:01:18 PM	SiCl4 pre valve closed
9/21/2011	11:01:18 PM	SiCl4 post valve closed
9/21/2011	11:01:18 PM	Main Vac valve closed
9/21/2011	11:01:18 PM	Bypass valve closed
9/21/2011	11:01:18 PM	Bubbler valve closed
9/21/2011	11:01:18 PM	Helium MFC set to  0.000000
9/21/2011	11:01:18 PM	H2 MFC set to  0.000000
9/21/2011	11:01:18 PM	BCl3 MFC set to  0.000000
9/21/2011	11:01:18 PM	PHl3 MFC set to  0.000000
9/21/2011	11:01:18 PM	SiCl4 MFC set to  0.000000
9/21/2011	11:01:18 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	11:01:18 PM	Tube furnace set to 0
9/21/2011	11:01:19 PM	Run finished at 11:01 PM
9/21/2011	11:03:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2011	11:03:21 PM	Recipe started at 11:03 PM
9/21/2011	11:03:21 PM	Helium valve closed
9/21/2011	11:03:21 PM	H2 valve closed
9/21/2011	11:03:21 PM	BCl3 valve closed
9/21/2011	11:03:21 PM	PH3 valve closed
9/21/2011	11:03:21 PM	SiCl4 pre valve closed
9/21/2011	11:03:21 PM	SiCl4 post valve closed
9/21/2011	11:03:21 PM	Main Vac valve closed
9/21/2011	11:03:21 PM	Bubbler valve closed
9/21/2011	11:03:21 PM	Bypass valve opened
9/21/2011	11:03:21 PM	Helium MFC set to  0.000000
9/21/2011	11:03:21 PM	H2 MFC set to  0.000000
9/21/2011	11:03:21 PM	BCl3 MFC set to  0.000000
9/21/2011	11:03:21 PM	PHl3 MFC set to  0.000000
9/21/2011	11:03:21 PM	SiCl4 MFC set to  0.000000
9/21/2011	11:03:21 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	11:03:22 PM	Tube furnace set to 0
9/21/2011	11:04:20 PM	Helium valve closed
9/21/2011	11:04:20 PM	H2 valve closed
9/21/2011	11:04:20 PM	BCl3 valve closed
9/21/2011	11:04:20 PM	PH3 valve closed
9/21/2011	11:04:20 PM	SiCl4 pre valve closed
9/21/2011	11:04:20 PM	SiCl4 post valve closed
9/21/2011	11:04:20 PM	Main Vac valve closed
9/21/2011	11:04:20 PM	Bubbler valve closed
9/21/2011	11:04:20 PM	Bypass valve opened
9/21/2011	11:04:20 PM	Helium MFC set to  0.000000
9/21/2011	11:04:20 PM	H2 MFC set to  0.000000
9/21/2011	11:04:20 PM	BCl3 MFC set to  0.000000
9/21/2011	11:04:20 PM	PHl3 MFC set to  0.000000
9/21/2011	11:04:20 PM	SiCl4 MFC set to  0.000000
9/21/2011	11:04:20 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	11:04:20 PM	Tube furnace set to 0
9/21/2011	11:05:20 PM	Helium valve closed
9/21/2011	11:05:20 PM	H2 valve closed
9/21/2011	11:05:20 PM	BCl3 valve closed
9/21/2011	11:05:20 PM	PH3 valve closed
9/21/2011	11:05:20 PM	SiCl4 pre valve closed
9/21/2011	11:05:20 PM	SiCl4 post valve closed
9/21/2011	11:05:20 PM	Bypass valve closed
9/21/2011	11:05:20 PM	Bubbler valve closed
9/21/2011	11:05:20 PM	Main Vac valve opened
9/21/2011	11:05:20 PM	Helium MFC set to  0.000000
9/21/2011	11:05:20 PM	H2 MFC set to  0.000000
9/21/2011	11:05:20 PM	BCl3 MFC set to  0.000000
9/21/2011	11:05:20 PM	PHl3 MFC set to  0.000000
9/21/2011	11:05:20 PM	SiCl4 MFC set to  0.000000
9/21/2011	11:05:20 PM	Bypass solenoid MFC set to  0.000000
9/21/2011	11:05:20 PM	Tube furnace set to 0
9/21/2011	11:05:21 PM	Run finished at 11:05 PM
9/21/2011	11:05:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
